New In-Sight 1700 offers advanced wafer ID performance in a fully integrated package

Citation

(2001), "New In-Sight 1700 offers advanced wafer ID performance in a fully integrated package", Sensor Review, Vol. 21 No. 3. https://doi.org/10.1108/sr.2001.08721caf.007

New In-Sight 1700 offers advanced wafer ID performance in a fully integrated package

New In-Sight 1700 offers advanced wafer ID performance in a fully integrated packageKeywords: Machine vision, Electronics industry, Cognex

Cognex, a leading supplier of machine vision systems to the semiconductor and electronics industries, has introduced the In-Sight 1700 wafer reader, a compact machine vision sensor that represents a major breakthrough in identifying and tracking semiconductor wafers through the manufacturing process (Plate 8). Based on Cognex's industry leading technologies for 2D matrix, alphanumeric and barcode identification, the new reader combines advanced ID software, image processing, and image illumination in a single, low-cost module. Peter Neve, International Marketing Director of Cognex, said:

With the ever-increasing value of today's larger, more densely populated semiconductor wafers, semiconductor manufacturers have a greater need to track wafers through the fabrication process using a product that is reliable, cost-effective, and easy to integrate. By delivering the most advanced, most highly integrated, most affordable wafer ID system available, the In-Sight 1700 delivers exactly what the semiconductor industry has been waiting for.

Plate 8 The In-Sight 1700 wafer reader combines advanced ID software, image processing and image illumination in a single, low-cost module

Unlike conventional wafer reading systems which require the complex and time-consuming integration of a separate PC, image formation system, camera, and other components, the In-Sight 1700 represents the highest level of integration ever achieved for wafer identification, making it easy to incorporate wafer ID into the laboratory process. The unit can be mounted horizontally or vertically, requires no mechanical adjustments, and can be integrated with a wide range of lab equipment including wafer handlers, sorters, probers, metrology tools, laser markers, and ion implant systems. Default recipe screens enable users to set up ID applications quickly and easily without any programming.

The In-Sight 1700 exceeds the wafer reading performance standard defined by Cognex products over the last 20 years. Offering robust, reliable reading performance, the In-Sight 1700 utilises advanced OCR, 2D matrix, and bar code recognition algorithms to read softmarked, super-softmarked, or hardmarked SEMI standard codes on the front or back side of a wafer. These algorithms work in conjunction with the unit's fully digital, on-board image formation system. The light path from the integral illumination can be controlled, enabling the WaferReader to read codes even when they have been degraded by CMP, copper metallization, oxides, or other process effects.

With built-in Ethernet networking capabilities, multiple In-Sight 1700 wafer readers can be easily linked throughout the laboratory and managed in a number of ways. For example, users can set up and modify ID applications from remote sites and monitor reading activity from any location in the laboratory. The 1700 can also be linked with other Cognex In-Sight vision sensors for semiconductor applications that may require other operations such as alignment, cassette mapping and tracking, and robot guidance.

The In-Sight 1700 is equipped with a complete wafer ID software library pre-installed, and will be available in May 2001.

For further information, please contact: Geoff Collins, Cognex UK, Units 7-9, First Quarter, Blenheim Road, Epsom KT19 9QN, UK. Tel: +44 (0)1372 726150; Fax: +44 (0)1372 726276; E-mail: gcollins@ cognex.com