New pressure sensor design and die has improved stability and linearity

Sensor Review

ISSN: 0260-2288

Article publication date: 1 March 2000




(2000), "New pressure sensor design and die has improved stability and linearity", Sensor Review, Vol. 20 No. 1.



Emerald Group Publishing Limited

Copyright © 2000, MCB UP Limited

New pressure sensor design and die has improved stability and linearity

Keywords Pressure sensors, Silicone

An ultra-stable silicon die and isolation diaphragm design from EG&G IC Sensors improves pressure sensor performance and lowers cost (see Plate 5). The company reports that, compared to current products, the new Model 86 reduces linearity errors by 50 percent and substantially reduces temperature errors over the much wider compensated range of -20°C to +85°C.

Plate 5 EG&G IC Sensors=Model 86 diaphragm protected pressure sensor design and ultra-stable die improves linearity and long term stability

Design benefits

A 316 stainless steel diaphragm protects the sensing element from corrosive (or incompatible) media, and a small volume of silicon oil between the diaphragm and the sensing element transmits pressure changes to the sensing element accurately.

The ultra-stable silicon die and diaphragm design, combined with a new design package that reduces the volume of silicon oil, result in reduced temperature errors and improved linearity, the company reports. Economies in manufacture stemming from the new design allow unit cost pricing 50 percent below current products for high volume OEM markets, states the company.

OEM uses

The Model 86 is designed for incorporation into OEM pressure and level transmitters, and the -20°C compensation lower limit is suited to outdoor industrial applications. The sensor is available with vent tubes for level measurement, and with tabs for easy attachment to transducers. Six pressure ranges cover from 0-1 bar gauge to 0-34 bar gauge, and four absolute pressure ranges are available.


Applications for the piezoresistive sensor include transmitters and transducers, hydraulics, process control, oceanography, refrigeration and compressors, and medical drug infusion systems.

The 0-100mV output connects to an external differential amplifier, and a gain set resistor is provided to ensure interchangeability of units to within 1 percent of span. The standard mounting is an O-ring seal.

EG&G IC Sensors, located in Milpitas, California, USA, designs and manufactures silicon, micromachined pressure sensors, accelerometers and custom microstructures, which are marketed worldwide.

For further information please contact: EG&G IC Sensors Inc., 1701 McCarthy Boulevard, Milpitas, CA 95035, USA. Tel: 408 432 1800; Ext: 1222; Fax: 408 432 7322.

Related articles