Slim profile UV probe stable in hostile environments

Sensor Review

ISSN: 0260-2288

Article publication date: 1 March 1999

36

Keywords

Citation

(1999), "Slim profile UV probe stable in hostile environments", Sensor Review, Vol. 19 No. 1. https://doi.org/10.1108/sr.1999.08719aad.010

Publisher

:

Emerald Group Publishing Limited

Copyright © 1999, MCB UP Limited


Slim profile UV probe stable in hostile environments

Slim profile UV probe stable in hostile environments

Keywords Probes, Ultraviolet

A low profile UV probe that is designed to perform continuous monitoring and dose measurements in hostile optical radiation environments, without interfering with normal machine processes, is being introduced by International Light Inc. of Newburyport, MA, USA.

The SSD301A Super Slim UV Probe is under 2.5mm thick x 29mm x 38mm, permitting it to perform continuous monitoring in microlithography and photoresist production lines (see Plate 10). Featuring a heat and optical radiation resistant surface which protects the input optics, it maintains < 1 per cent per year change in stability in hostile environments, depending on dose.

Plate 10 The SSD301A Super Slim UV Probe

Providing a spectral response from 260 to 400nm over a 3to 1µW/cm2 dynamic range, the SSD301A Super Slim UV Probe is compatible with the firm's IL1400A and IL1700 Research Radiometers which provide direct readouts in actual units. Supplied with a two-metre shielded and insulated cable, it fits under the vacuum frame of PCB production equipment.

The SSD301A Super Slim UV Probe is priced at $401 (list) and a complete system is priced at $1,213. Literature is available on request.

For more information contact Robert Angelo, Marketing Manager, International Light, Inc., 17 Graf Road, Newburyport, MA, USA. Tel: (978) 465 5923; Fax: (978) 462 0759; E-mail: ilsales@intl-light.com; Web site: http://www.intl-light.com

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