TY - JOUR AB - VL - 28 IS - 1 SN - 1356-5362 DO - 10.1108/mi.2011.21828aab.005 UR - https://doi.org/10.1108/mi.2011.21828aab.005 PY - 2011 Y1 - 2011/01/01 TI - High-value MEMS are projected to reach US$1.6 billion in 2010, up 29.7 percent from US$1.2 billion in 2009 T2 - Microelectronics International PB - Emerald Group Publishing Limited Y2 - 2024/04/19 ER -