TY  - JOUR
AB  - 
VL  - 25
IS  - 3
SN  - 1356-5362
DO  - 10.1108/mi.2008.21825cab.005
UR  - https://doi.org/10.1108/mi.2008.21825cab.005
PY  - 2008
Y1  - 2008/01/01
TI  - ASML Ships 1,000th KrF lithography system; milestone confirms KrF leadership in productivity and system extendibility
T2  - Microelectronics International
PB  - Emerald Group Publishing Limited
Y2  - 2024/04/25
ER  -