TY  - JOUR
AB  - 
VL  - 25
IS  - 2
SN  - 1356-5362
DO  - 10.1108/mi.2008.21825bad.013
UR  - https://doi.org/10.1108/mi.2008.21825bad.013
PY  - 2008
Y1  - 2008/01/01
TI  - Photo etching ... an enabling technology for miniaturisation
T2  - Microelectronics International
PB  - Emerald Group Publishing Limited
Y2  - 2024/04/23
ER  -