TY - JOUR AB - VL - 20 IS - 2 SN - 1356-5362 DO - 10.1108/mi.2003.21820bab.007 UR - https://doi.org/10.1108/mi.2003.21820bab.007 PY - 2003 Y1 - 2003/01/01 TI - MicroTech 2003 T2 - Microelectronics International PB - Emerald Group Publishing Limited Y2 - 2024/04/19 ER -