(2002), "Semiconductor characterization software provides simultaneous HF and quasistatic C-V measurements", Microelectronics International, Vol. 19 No. 1. https://doi.org/10.1108/mi.2002.21819aad.008
Emerald Group Publishing Limited
Copyright © 2002, MCB UP Limited
Semiconductor characterization software provides simultaneous HF and quasistatic C-V measurements
Keithley Instruments, Inc. has introduced capacitance characterization software for its Model 4200-SCS Semiconductor Characterization System. (Plate 4) The new capabilities allow users to conduct simultaneous high frequency (HF) and quasistatic (QS) C-V measurements on wafer devices with a single voltage sweep, using Keithleys Model 82 Simultaneous C-V instrumentation. This technique improves C-V measurement accuracy by reducing the voltage stress on the devices under test and eliminating the need for the use of theoretical curves and doping profile assumptions.
Simultaneous C-V requires only half the sweep time of sequential HF/QS measurements, so it also increases test productivity.
For more information visit: www.keithley.com