Keywords
Citation
(2001), "Siemens introduces the world's smallest wafer identification system", Microelectronics International, Vol. 18 No. 3. https://doi.org/10.1108/mi.2001.21818cad.001
Publisher
:Emerald Group Publishing Limited
Copyright © 2001, MCB UP Limited
Siemens introduces the world's smallest wafer identification system
Siemens introduces the world's smallest wafer identification system
Keyword: Siemens
The Electronics Assembly Systems division of Siemens Dematic AG, claims it can supply the smallest stand-alone wafer ID system for the semiconductor industry available in the market. A new type of patented illumination technology is used which ensures a unique degree of reliability in image recognition (see Plate 1).
The identification code on wafer surfaces is, as a rule, difficult to discern, even for experienced production staff. This is due to abrasion processes, which occur during the various processing phases. Continuous improvements in illumination, based on the different optical properties of the wafer surface, lead to the best possible detection result in each case. Moreover, the LKx5 adapts itself automatically to the various types of markings.
Plate 1 The
smallest stand-alone wafer ID system from Siemens Dematic AG
The LKx5 can identify OCR (optical character recognition), bar and 2D dot matrix codes which have been applied to the front or back of the wafer.
Owing to its very small dimensions (37mm x 70mm x 110mm), the unit can be integrated into every processing step in semiconductor production.
For further information, please contact: E-mail: franz.friese@nbgm.siemens.de