Next-generation Laser Probe System for flip chips

Citation

(2001), "Next-generation Laser Probe System for flip chips", Microelectronics International, Vol. 18 No. 1. https://doi.org/10.1108/mi.2001.21818aad.010

Next-generation Laser Probe System for flip chips

Next-generation Laser Probe System for flip chips

Keywords: Schlumberger Semiconductor Solutions, Phase interferometer detector

Schlumberger Semiconductor Solutions claims that the IDS 2500 is the highest precision timing measurement tool for design verification and failure analysis of leading-edge flip-chip packaged ICs. The IDS 2500 uses innovative PID (Phase Interferometer Detector) technology to speed access to critical waveforms that designers and product development engineers need to de-bug new high-end flip-chip logic devices. Designed for greater efficiency at 0.18-micron processing and beyond, new features of the IDS 2500 improve productivity and enable manufacturers creating complex devices – including MPUs, NPUs, and ASICs – to shrink critical time-to-market.

The system speeds the analysis of first silicon by combining faster acquisition time and greater signal strength with the proprietary PID, which adjusts the laser scanning microscope (LSM) and makes it easier to use. PID, the new LSM technique, uses a "reference beam" and a probe beam to measure the interference between the two reflected signals. This phase interference method significantly improves responsiveness and accuracy by taking advantage of measurement physics and increasing the overall number of waveforms per hour the tool can provide. Signal strength has improved two times enabling IC waveforms to be acquired faster. Proven on 0.18-micron processing, new 2ms duty cycle capabilities enable the system to debug complex ICs that require a long test loop length.

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