Keywords
Citation
(1999), "New Leica INS 1000 post-electrical test inspection station", Microelectronics International, Vol. 16 No. 3. https://doi.org/10.1108/mi.1999.21816cad.014
Publisher
:Emerald Group Publishing Limited
Copyright © 1999, MCB UP Limited
New Leica INS 1000 post-electrical test inspection station
New Leica INS 1000 post-electrical test inspection station
Keywords Leica, Inspection
The new Leica INS 1000 post-electrical test inspection station (PETIS) is an enhanced system for the inspection of whole wafers after electrical testing.
The PETIS system allows the direct importation of test files from electrical testers. Software routines enable the tool to revisit locations on the wafer that have failed electrical testing, to classify codes of the failures and store them in a data file. Direct comparison with adjacent good die and operator overwrite for quick wafer die qualification and map update is also possible. The system performs automated wafer alignment and OCR wafer ID input, for speed and consistency. The PETIS system will interface with most test systems, is GEM compatible and will output map files for further die processing. The basic INS 1000 station still maintains all of the flexible optical inspection techniques available on the standard INS 1000, including UV imaging for high resolution wafer inspection.
For further information please contact Molly Lundberg, Director, Communications. Tel: +1 847/405 7026; Fax: +1 847/405 0030.