Keywords
Citation
(1999), "Johnson Matthey Hydrogen Technology Group delivers hydrogen purifier units to Aixtron AG of Aachen, Germany", Microelectronics International, Vol. 16 No. 2. https://doi.org/10.1108/mi.1999.21816bad.004
Publisher
:Emerald Group Publishing Limited
Copyright © 1999, MCB UP Limited
Johnson Matthey Hydrogen Technology Group delivers hydrogen purifier units to Aixtron AG of Aachen, Germany
Johnson Matthey Hydrogen Technology Group delivers hydrogen purifier units to Aixtron AG of Aachen, Germany
Keywords Gas purification, Hydrogen, Johnson Matthey
Johnson Matthey Hydrogen Technology Group, recently announced the delivery of two model HE120 hydrogen purifiers to Aixtron AG of Aachen, Germany, the world's leading manufacturer of MOCVD equipment.
Aixtron is supplying the two purifiers to Epitaxial Products International Ltd's newly expanded manufacturing facility in South Wales where they will be used to enhance a variety of advanced semiconductor structures.
The HE120 hydrogen purifier is a technologically advanced system with a state-of-the-art design providing maximum performance and efficiency for low volume point-of-use purification, achieving purity levels of 99.9999999 percent.
The HE120 has many key design features including a separate electrical control, automatic nitrogen purge system, a low feed gas pressure switch, a feed gas pressure gauge and isolation and check valves including isolation valves on each individual membrane.
For further information, please contact Dr Tom Purcell. Tel: +44 (0)1462 478403; E-mail: purcet@matthey.com