Advanced Surface Technology introduces the new plasma system product line

Citation

(1999), "Advanced Surface Technology introduces the new plasma system product line", Microelectronics International, Vol. 16 No. 1. https://doi.org/10.1108/mi.1999.21816aad.005

Advanced Surface Technology introduces the new plasma system product line

Advanced Surface Technology introduces the new plasma system product line

Keywords Advanced Surface Technology, Plasma

Advanced Surface Technology, Inc. has introduced a new product line of plasma systems. As a provider of innovative and creative surface modification and treatment, AST is able to incorporate its technology expertise with the plasma system to offer AST Plasma Solution, a packaged solution for plasma surface treatment.

An integrated plasma solutionThe AST Plasma Solution integrates the commitment of technical support, expertise advise and the newly designed, state of the art plasma reactors to offer customers the solution of effective plasma surface treatment. AST also provides application lab service for optimizing any unique process.

The reactor systems are designed from both operators and engineers' points of view with easy on-off and multiple recipe choice, operator lockout for critical controls, and other convenient features such as two-gas input capability. AST's own application lab provides system testing for quality control and can assist in technical advice and unique process development. Engineering support is committed through in-house and reliable outsource. Training and technical support are also available to eliminate long learning curves for sophisticated applications.

Initially, AST will offer plasma systems for microelectronics application in hybrid circuits cleaning/ etching but will gradually expand the product line to include more sophisticated systems for medical, biological and other industrial applications.