The Science and Engineering of Microelectronic Fabrication

Industrial Robot

ISSN: 0143-991x

Article publication date: 1 April 2000




(2000), "The Science and Engineering of Microelectronic Fabrication", Industrial Robot, Vol. 27 No. 2.



Emerald Group Publishing Limited

Copyright © 2000, MCB UP Limited

The Science and Engineering of Microelectronic Fabrication

The Science and Engineering of Microelectronic Fabrication

S.A. CampbellOxford University Press1996536 pp.ISBN 0-19-510508-7£35.00 (Hardcover)

Keywords: Microelectronic, Fabrication

The Science and Engineering of Microelectronic Fabrication introduces microelectronic processing in a manner which is suitable for a wide range of readers. This book is primarily aimed at upper level undergraduate or first-year graduate students but it may be of interest to certain practising professionals.

The emphasis of this text is on silicon-based technologies, although GaAs are also discussed. Each chapter includes a number of worked examples, problems and reviews of the science that underlies the engineering practices.

This book consists of five parts, the first part giving an overview and introduction to the materials used. The subsequent parts each cover one of the fundamental building blocks required for microelectronic fabrication.

Part 2 addresses hot processing and ion implantation and covers topics including diffusion, thermal oxidation, ion implantation and rapid thermal processing. Pattern transfer is discussed in part 3 of the text and includes optical lithography, photoresists, non-optical lithographic techniques, etching and vacuum science and plasmas. Part 4 addresses thin films and covers physical decomposition, chemical vapour deposition and epitaxial growth. The final section of the book, part 5, looks at process integration. This includes device isolation, contacts and metalization, CMOS technologies, GaAs FET technologies, silicon bipolar technologies and integrated circuit manufacturing. The book also contains seven Appendices.

Overall this text clearly presents the fundamental parts of a complicated technology. Its only fault is that there are no solutions given for the problem questions.

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