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PZT‐based Thick Films and the Development of a Piezoelectric Pressure Sensor

B. Morten (Physics Department, University of Modena, Modena, Italy)
G. De Cicco (Physics Department, University of Modena, Modena, Italy)
A. Gandolfi (Physics Department, University of Modena, Modena, Italy)
C. Tonelli (Physics Department, University of Modena, Modena, Italy)

Microelectronics International

ISSN: 1356-5362

Article publication date: 1 February 1992

Abstract

A study has been carried out on the relationship between the composition, poling condition and piezoelectric properties of thick film layers. Pastes based on lead‐titanate‐zirconate (PZT) powders, with either PbO or a lead‐alumina‐silicate glass frit as binder, were prepared. Microstructure, electrical and mechanical properties were analysed. Processing and poling conditions modify these properties; then a wide latitude of opportunities is offered in the choice of ferroelectric/piezoelectric characteristics of the layers used as sensing elements for sensors. A pressure sensor was realised where a circular diaphragm of alumina supports two piezoelectric layers obtained by screen printing and firing a PZT/PbO‐based ferroelectric paste. The design and the performance characteristics are described.

Citation

Morten, B., De Cicco, G., Gandolfi, A. and Tonelli, C. (1992), "PZT‐based Thick Films and the Development of a Piezoelectric Pressure Sensor", Microelectronics International, Vol. 9 No. 2, pp. 25-28. https://doi.org/10.1108/eb044572

Publisher

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MCB UP Ltd

Copyright © 1992, MCB UP Limited