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A Screen Printed Multilayer PZT Actuator with an Integrated Force Sensor

H. Moilanen (Microelectronics and Material Physics Laboratories, University of Oulu, Oulu, Finland)

S. Leppävuori (Microelectronics and Material Physics Laboratories, University of Oulu, Oulu, Finland)

ISSN: 1356-5362

Article publication date: 1 May 1995

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Moilanen, H. and Leppävuori, S. (1995), "A Screen Printed Multilayer PZT Actuator with an Integrated Force Sensor", Microelectronics International, Vol. 12 No. 2, pp. 28-30. https://doi.org/10.1108/eb044562

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