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Copper Thick‐film Firing Optimisation Using a New Nitrogen‐based Atmosphere Control System

S. Mellul (L'Air Liquide, Jouy en Josas, France)
P. Dupin (Power Compact, Mérignac, France)

Microelectronics International

ISSN: 1356-5362

Article publication date: 1 March 1992

Abstract

A new proprietary nitrogen‐based atmosphere control system (Alix 1) has been developed by L'Air Liquide, allowing control and regulation of the oxygen partial pressure in the burnout zone of a copper thick‐film firing furnace. The results of a collaboration programme whose objective was to test this system in industrial production conditions at Power Compact are presented. Use of this new system enables improvement of the adhesion results reached by this company in their copper thick‐film hybrid production and ensures a constant level of performance.

Citation

Mellul, S. and Dupin, P. (1992), "Copper Thick‐film Firing Optimisation Using a New Nitrogen‐based Atmosphere Control System", Microelectronics International, Vol. 9 No. 3, pp. 15-18. https://doi.org/10.1108/eb044476

Publisher

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MCB UP Ltd

Copyright © 1992, MCB UP Limited