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Intelligent Thick‐film Gas Sensor

B.S. Hoffheins (Oak Ridge National Laboratory, Oak Ridge, Tennessee, USA)
R.J. Lauf (Oak Ridge National Laboratory, Oak Ridge, Tennessee, USA)
M.W. Siegel (Carnegie‐Mellon University, Pittsburgh, Pennsylvania, USA)

Microelectronics International

ISSN: 1356-5362

Article publication date: 1 March 1987



An intelligent gas sensor has been developed using thick‐film techniques to create a semiconducting oxide surface with carefully varied catalytic properties. An integral heater causes the surface to react with combustible gases and the resulting resistance map of the surface forms a signature that can be related to the functional groups present in the gas. For example, alcohols, ketones and alkanes have distinct, recognisable signatures on one sensor model.


Hoffheins, B.S., Lauf, R.J. and Siegel, M.W. (1987), "Intelligent Thick‐film Gas Sensor", Microelectronics International, Vol. 4 No. 3, pp. 8-12.




Copyright © 1987, MCB UP Limited

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