Protective Thin Film Coatings by Plasma Polymerisation
R.K. Sadhir
(Westinghouse R&D Center, Pittsburgh, Pennsylvania, USA)
H.E. Saunders
(Westinghouse R&D Center, Pittsburgh, Pennsylvania, USA)
69
Abstract
The paper describes the plasma polymerisation process for depositing ultrathin films. Such films, deposited from monomers containing hydrophobic elements such as hexafluorobenzene and hexamethyldisiloxane, showed excellent water vapour barrier properties, due to dense, highly crosslinked and rigid structures of the films. The composition and structure of the plasma polymerised films have been elucidated by ESCA and infra‐red spectroscopy.
Citation
Sadhir, R.K. and Saunders, H.E. (1986), "Protective Thin Film Coatings by Plasma Polymerisation", Microelectronics International, Vol. 3 No. 1, pp. 28-32. https://doi.org/10.1108/eb044211
Publisher
:MCB UP Ltd
Copyright © 1986, MCB UP Limited