TWO‐DIMENSIONAL PROCESS SIMULATION USING A QUADRATIC FINITE ELEMENT DISCRETIZATION
ISSN: 0332-1649
Article publication date: 1 January 1984
Abstract
The finite element method is used to solve the non‐linear diffusion equation, taking account of the interaction between impurities due to self‐induced electric field and charged vacancies effects, and of various boundary conditions (evaporation, segregation, oxidation growth…). An incomplete implicit scheme gives the solution of the temporal equation deduced from a quadratic space discretization. The temporal and spatial problems being proved to be quite independent, specific locally refined meshes are developed. The quadratic shape functions allow the use of evolutive mesh for the oxidation simulation without profile degradation. Two realistic industrial steps are described to demonstrate the efficiency of the code.
Citation
COLLARD, D. and DECARPIGNY, J.N. (1984), "TWO‐DIMENSIONAL PROCESS SIMULATION USING A QUADRATIC FINITE ELEMENT DISCRETIZATION", COMPEL - The international journal for computation and mathematics in electrical and electronic engineering, Vol. 3 No. 1, pp. 17-33. https://doi.org/10.1108/eb009985
Publisher
:MCB UP Ltd
Copyright © 1984, MCB UP Limited