Industrial applications for optical profilometry
A.J.C. Brown
(UBM GmbH, West Germany)
F. Gilbert
(UBM GmbH, West Germany)
46
Abstract
Optical profilometry has many industrial uses, from machine tool measurements to microelectronics, as experts explain.
Citation
Brown, A.J.C. and Gilbert, F. (1990), "Industrial applications for optical profilometry", Sensor Review, Vol. 10 No. 1, pp. 35-37. https://doi.org/10.1108/eb007811
Publisher
:MCB UP Ltd
Copyright © 1990, MCB UP Limited