Sensor fabrication: micromachining marches on

Abstract

Micromachining is becoming an increasingly important technique in sensor fabrication and could have huge potential commercially, as Stephen McClelland explains.

Citation

(1987), "Sensor fabrication: micromachining marches on", Sensor Review, Vol. 7 No. 2, pp. 83-84. https://doi.org/10.1108/eb007718