Hybrid measuring machine probes micro-features with CMM accuracy

Aircraft Engineering and Aerospace Technology

ISSN: 0002-2667

Article publication date: 1 December 2004

Keywords

Citation

(2004), "Hybrid measuring machine probes micro-features with CMM accuracy", Aircraft Engineering and Aerospace Technology, Vol. 76 No. 6. https://doi.org/10.1108/aeat.2004.12776fad.008

Publisher

:

Emerald Group Publishing Limited

Copyright © 2004, Emerald Group Publishing Limited


Hybrid measuring machine probes micro-features with CMM accuracy

Hybrid measuring machine probes micro-features with CMM accuracy

Keywords: Measurement, Microelectronics

The Mituotyo UMAP Vision System Hyper 302 is a hybrid vision/touch-probe measuring machine that can reportedly gauge features so small, they are practically invisible to the naked eye, such as fuel injector holes and optical ferrules of the order of 0.1 mm diameter.

Based on an extremely accurate vision machine that locates the target and guides the probe, UMAP Vision System uses ultrasonically activated micro-probes with tip diameters as small as 30 urn to measure features previously considered unmeasurable with a contact method. Contact probing depth is 12 mm with an 80 urn probe, and 2 mm with a 30 urn probe.

Although the hair-like probes are very delicate, a user-detachable and maintainable stylus structure is provided for ease of use and maintenance. This feature makes it possible to remove the touch- probe capability entirely to allow use as a high performance, stand alone vision measuring machine.

Also recently released by Mitutoyo is its LEGEX 322, which the company believes sets a new performance standard for compact coordinate measuring machines. Reflective linear encoders on all axes combined with extraordinary geometric and kinematic precision provide an accuracy of (0.8+0.2L/100) pm at a resolution of 0.01 pm.

An integrated, thermal-effect compensation system takes account of instrument and workpiece temperature variation and guarantees that this level of accuracy is maintained over the range 18-22°C.

High traverse speed and acceleration – 200 mm/s and 850 mm/s2, all axes driven – mean LEGEX 322 is a fast performer. The fixed-bridge and moving measuring table design provides maximum stability and the fully digital servo control ensures low-vibration movements.

The built-in controller gives LEGEX 322 a small-footprint for ease of installation where space is at a premium. It is easily set-up and the premium software supplied as standard makes for user- friendly measurement and evaluation.

Details available from: Mitutoyo (UK) Limited. Tel: +44 (0) 1264 353123; Fax: +44 (0)1264 354883; E-mail: caron.moselev@mitutovo.co.uk