Miniature direct-drive linear motor stages have an ultra low profile of just 25 mm

Citation

(2004), "Miniature direct-drive linear motor stages have an ultra low profile of just 25 mm", Assembly Automation, Vol. 24 No. 1. https://doi.org/10.1108/aa.2004.03324aad.006

Miniature direct-drive linear motor stages have an ultra low profile of just 25 mm

Miniature direct-drive linear motor stages have an ultra low profile of just 25 mm

Keywords: Linear motor

Industry's smallest linear servo motor driven positioner is ideal for space-critical sub-micron applications in photonic, biomed and semiconductor industries.

Parker Hannifin EME has launched a series of miniature linear servo motor driven positioning stages that have a height of just 25 mm and a width of 80 mm, making them the smallest units of their type in the industry (Plate 6).

Plate 6 Parker's new MX80L direct-drive linear motor stages have a height of just 25 mm. Employing a highly innovative linear servo motor, the stages are capable of sub-micron positioning accuracy

Known as the MX80L series, these new positioners are completely self-contained, incorporating a novel design of linear servo motor, and a precision optical encoder. Their exceptionally low profile enables high performance linear servo motors to be applied to space-critical applications that were previously outside the domain of this type of technology. Typically, these include ultra- precise, sub-micron motion control in today's fast-growing photonics, biomedical and semiconductor development and manufacturing industries.

The linear servo motor at the heart of the MX80L is a highly-innovative, patent-pending, three-phase brushless unit, specifically optimised for force, speed and acceleration. Unlike competitive stages based on piezo- electric motor technology, the MX80L series is capable of generating a peak force of up to 24N, and operates with industry-standard servo amplifiers and controllers without the need for software “patches” or special control algorithms. Parker's latest ViX250 intelligent servo drive provides a compact all-digital control companion for MX80L, enabling very high performance multi-axis systems to be configured with ease.

MX80L series linear motor stages are available with a choice of 25, 50, 100 and 150 mm travel lengths, and have a normal load capacity of 8 kg. The built-in optical encoder provides sub-micron resolution, repeatability and accuracy; it offers six selectable resolutions, spanning 10 nm-5 μm. Depending on the chosen configuration, the stages are capable of positioning velocities as high as 2 m/s, and acceleration rates of up to 5G. All MX80L series linear motor stages are equipped with precision-ground cross-roller bearings to provide extremely smooth and precise linear translation, and feature a unique “zero cage creep” design that is optimised for high acceleration applications.

Parker offers two performance grades of MX80L, for maximum applications flexibility. The standard grade version features an aluminium body and carriage, and provides a positioning accuracy of 12 μm, with a repeatability of ±0.8 μm. The precision grade version has a steel body and carriage for even greater flatness and straightness, uses precision ground mounting surfaces and bearing ways, and is factory laser tested and supplied with a linear slope correction value for optimum results. It is capable of industry-leading performance, providing an exceptionally high positioning accuracy of 3 μm, with a repeatability of just ±0.4 μm.

Parker's MX80L series are the only miniature linear motor stages on the market to feature a master reference surface, which enables users to align automation processes very precisely by using the travel axis as the actual datum. Precision dowel holes facilitate highly accurate and repeatable mounting of both the payload and the motor stage itself. Built-in optical travel limit and home sensors are provided as standard, and are easily adjustable over the entire travel range of the stage. Furthermore, although there are no moving cables within MX80L series tables – which helps maximise reliability – each table is equipped with a length of hi-flex cabling, for use in multi-axis applications.

All MX80L series linear motor stages are rated for 100 per cent duty cycle, making them ideal for today's demanding automation applications. Both the standard and precision grade versions of the stages are supplied with a low lustre black surface finish, which minimises light reflection in low light optical applications. A low ESD electroless nickel coating, which provides a very low resistance path to ground from all surfaces of the MX80L, is available as an option. Either surface finish may be combined with the option for cleanroom preparation, providing solutions for a wide range of application environments.

To find out more about Parker Hannifin EME, visit the company's Web site: www.parker-eme.com

For further details, contact: Sharon Beale, Customer Services, Parker Hannifin plc. Electromechanical Europe, Balena Close, Poole, Dorset BH17 7DX, UK. Tel: +44 (0) 1202 69 9000; Fax: +44 (0) 1202 69 5750; E-mail: sales.digiplan@parker.com