Keywords
Citation
Rigelsford, J. (2002), "MEMS variable optical attenuator", Assembly Automation, Vol. 22 No. 1. https://doi.org/10.1108/aa.2002.03322aad.015
Publisher
:Emerald Group Publishing Limited
Copyright © 2002, MCB UP Limited
MEMS variable optical attenuator
MEMS variable optical attenuator
Keyword: MEMS
Applicant: JDS Uniphase, Inc., CanadaPatent number: US6,275,320Publication date: 14 August 2001Title: MEMS Variable Optical Attenuator
This patent relates to a MEMS device that is capable of attenuating an optical beam over a full range of optical power. The devices comprises a micro-electronics substrate having a generally planar surface; a MEMS actuator and an optical shutter which may be locked as a desired attenuation position.
The variable light attenuator is capable of attenuating optical beams that have their optical axis running parallel and perpendicular to the substrate. Additionally, the invention may comprise an array of MEMS actuators capable of supplying the optical shutter with greater displacement distances and, thus a fuller range of optical attenuation. In one embodiment of the invention, the MEMS actuator comprises a thermal arched beam actuator and may be embodied in a thermal bimorph cantilever structure. This alternate embodiment includes a micro-electronics substrate and a thermal bimorph cantilever structure having at least two materials of different thermal coefficient of expansion. The thermal bimorph is responsive to thermal activation and moves in the direction of the material having the lower thermal coefficient expansion. Upon activation, the thermal bimorph intercepts the path of the optical beam and provides for the desired level of optical attenuation.
Jonathan Rigelsford