Keywords
Citation
Rigelsford, J. (2002), "Apparatus and method for sensing motion in a MEMS", Assembly Automation, Vol. 22 No. 1. https://doi.org/10.1108/aa.2002.03322aad.010
Publisher
:Emerald Group Publishing Limited
Copyright © 2002, MCB UP Limited
Apparatus and method for sensing motion in a MEMS
Apparatus and method for sensing motion in a MEMS
Keyword: MEMS
Applicant: Sandia Corporation, Albuquerque, USAPatent number: US5,990,473Publication date: 23 November 1999Title: Apparatus and Method for Sensing Motion in a Micro-Electro-Mechanical System
An apparatus and method are disclosed for optically sensing motion in a MEMS device formed by surface micro-machining or LIGA. The apparatus operates by reflecting or scattering a light beam off a corrugated surface (e.g. gear teeth or a reference feature) of a moveable member (e.g. a gear, rack or linkage) within the MEMS device and detecting the reflected or scattered light. The apparatus can be used to characterise a MEMS device, measuring one or more performance characteristic such as spring and damping coefficients, torque and friction, or uniformity of motion of the moveable member. The apparatus can also be used to determine the direction and extent of motion of the moveable member; or to determine a particular mechanical state that a MEMS device is in. Finally, the apparatus and method described can be used for providing feedback to the MEMS device to improve performance and reliability.
Jonathan Rigelsford