TY  - JOUR
AB  - Purpose– The purpose of this paper is to present a novel nitrile butadiene rubber (NBR) packaging structure, which can solve the problems of the low sensitivity, narrow frequency band and fluctuating frequency response curve of the MEMS bionic vector hydrophone. Design/methodology/approach– A 0.05-mm-thick NBR sound-transparent cap was designed by theoretical analysis and simulation to reduce the signal attenuation caused by the packaging structure, and the frequency band of the hydrophone has been extended to 4 kHz. In this work, the vector hydrophone was fabricated by the MEMS technology and packaged with the NBR sound-transparent cap. The performance indicators were calibrated in the National Defence Underwater Acoustics Calibration Laboratory of China. Findings– The results show that the sensitivity of NBR-packaged hydrophone reaches −170 dB (±2 dB), and the difference is less than 1 dB compared to bare chip. And the frequency band is 50 Hz-4 kHz. The hydrophone also has good directional pattern in the form of an 8-shape, and the pressure-resisting ability is more than 2 MPa. Originality/value– The packaging structure significantly increases the sensitivity of the hydrophone and broadens the frequency band, providing a new method in the packaging design for MEMS hydrophone.
VL  - 35
IS  - 3
SN  - 0260-2288
DO  - 10.1108/SR-11-2014-0744
UR  - https://doi.org/10.1108/SR-11-2014-0744
AU  - Liu Mengran
AU  - Jian Ze ming
AU  - Zhang Guojun
AU  - Guo Nan
AU  - Zhang Wendong
PY  - 2015
Y1  - 2015/01/01
TI  - Design of MEMS bionic vector hydrophone based on NBR sound-transparent cap
T2  - Sensor Review
PB  - Emerald Group Publishing Limited
SP  - 303
EP  - 309
Y2  - 2024/04/25
ER  -