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A MEMS flow velocity sensor with low kinetic energy dissipation rate

Bian Tian (Xi’an Jiaotong University, Xi’an, China)
Huafeng Li (State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an, China)
Ning Yang (State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an, China)
Yulong Zhao (School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an, China)
Pei Chen (Chang’an University, Xi’an, China)
Hanyue Liu (State Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an, China)

Sensor Review

ISSN: 0260-2288

Article publication date: 19 June 2017

Abstract

Purpose

It is significant to know the real-time indexes about the turbulence flow of the ocean system, which has a deep influence on ocean productivity, distribution of the ocean populations and transmission of the ocean energy, especially the measurement of turbulence flow velocity. So, it is particularly urgent to provide a high-sensitivity, low-cost and reliable fluid flow sensor for industry and consumer product application. This paper aims to design a micro fluid flow sensor with a cross beam membrane structure. The designed sensor can detect the fluid flow velocity and has a low kinetic energy dissipation rate.

Design/methodology/approach

In this paper, a micro fluid flow sensor with a cross beam membrane structure is designed to measure the ocean turbulence flow velocity. The design, simulation, fabrication and measurement of the designed sensor are discussed. By testing the simply packaged sensor in the fluid flow and analyzing the experiments data, the results show that the designed sensor has favorable performance.

Findings

The paper describes the tests of the designed sensor, and the experimental results show that the designed sensor can measure the fluid flow velocity and has a sensitivity of 11.12 mV/V/(m/s)2 and a low kinetic energy dissipation rate in the range of 10-6-10-4 W/kg.

Originality/value

This paper provides a micro-electro-mechanical systems fluid flow sensor used to measure ocean turbulence flow velocity.

Keywords

Acknowledgements

This work was supported by the National High Technology Research and Development of China (863 Program, Grant No. 2014AA093404) and Collaborative Innovation Center of Suzhou Nano Science and Technology.

Citation

Tian, B., Li, H., Yang, N., Zhao, Y., Chen, P. and Liu, H. (2017), "A MEMS flow velocity sensor with low kinetic energy dissipation rate", Sensor Review, Vol. 37 No. 3, pp. 247-256. https://doi.org/10.1108/SR-09-2016-0182

Publisher

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Emerald Publishing Limited

Copyright © 2017, Emerald Publishing Limited