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An improved structural design for accelerometers based on slotted eight-beam structure

Peng Wang (State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an, China)
Yulong Zhao (State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an, China)
You Zhao (State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an, China)
Qi Zhang (State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an, China)
Anjiang Cai (Xi’an University of Architecture and Technology, Xi’an, China)

Sensor Review

ISSN: 0260-2288

Article publication date: 5 December 2017

Issue publication date: 8 January 2018

Abstract

Purpose

The purpose of this paper is proposed a new structure design for high performance accelerometer.

Design/methodology/approach

An improved sensitivity structure considering sensitivity, natural frequency and cross-axis sensitivity is established and realized. The proposed structure was designed to improve the trade-off between the sensitivity and the natural frequency of piezoresistive accelerometer and eliminate the lateral sensitivity effect by the specific configuration, which is made possible by incorporating slots into the eight-beam structure. The mechanical model and its mathematical solution are established for calculating the sensitivity and natural frequency behavior of the designed structure. The developed sensor is fabricated on the n-type single-crystal silicon wafer and packaged for experiment. The accelerometer prototype was tested in the centrifugal machine and dynamic calibration system.

Findings

The experimental results show that the sensitivity of the designed sensor is 0.213 mV/(Vg) and the natural frequency of the sensor is 14.22 kHz. Compared with some piezoresistive accelerometers in literatures, the designed sensor possesses a suitable characteristic in sensitivity, natural frequency and transverse effect, which allows its usage in measuring high frequency vibration signals.

Originality/value

The accelerometer with slotted eight-beam structure shows a good performance in the static and dynamic experiments and can be used in measuring high frequency vibration signals.

Keywords

Acknowledgements

The work presented in this paper is supported by National Science Funds for Distinguished Young Scholars (Grant No. 51325503), National Nature Science Fund (Grant No.51275402) and Funds for Creative Research Groups of China (No. 51421004).

Citation

Wang, P., Zhao, Y., Zhao, Y., Zhang, Q. and Cai, A. (2018), "An improved structural design for accelerometers based on slotted eight-beam structure", Sensor Review, Vol. 38 No. 1, pp. 1-8. https://doi.org/10.1108/SR-05-2017-0077

Publisher

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Emerald Publishing Limited

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