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Performance simulation and testing of capacitive micro-machined ultrasonic transducer

Rui Zhang (Department of Computer Science and Technology, Taiyuan University of Science and Technology, Taiyuan, China)
Lei Zhao (Edan Instruments, Inc., Shenzhen, China)
Dan Xie (Department of Computer Science and Technology, Taiyuan University of Science and Technology, Taiyuan, China)
Jinlong Song (National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science and Dynamic Measurement (North University of China), Ministry of Education, North University of China, Taiyuan, China)
Wendong Zhang (National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science and Dynamic Measurement (North University of China), Ministry of Education, North University of China, Taiyuan, China)
Lihu Pan (Department of Computer Science and Technology, Taiyuan University of Science and Technology, Taiyuan, China)
Yanhua Zhang (Department of Computer Science and Technology, Taiyuan University of Science and Technology, Taiyuan, China)

Sensor Review

ISSN: 0260-2288

Article publication date: 15 July 2019

Abstract

Purpose

This study aims to simulate and test the performance of a transmitting and receiving capacitive micro-machined ultrasonic transducer (CMUT). Aimed at detecting demand of the CMUT, a matched integrated adjustment circuit was designed through analyzing processing methods of transducer’s weak echo signal.

Design/methodology/approach

Based on the analysis of CMUT array structure and work principle, the CMUT units are designed and the dynamic performance analysis of SIMULINK is given according to the demand of underwater detecting. A transceiver isolation circuit is used to make transmission mode and receiving mode separate. A detection circuit is designed based on the transimpedance amplifier to achieve extraction of high-frequency and weak signal.

Findings

Through experimentation, the effectiveness of the CMUT performance simulation and the transceiver integrated adjustment circuit were verified. In addition, the test showed that CMUT with 400 kHz frequency has wider bandwidth and better dynamic characteristics than other similar transducers.

Originality/value

This paper provides a theoretical basis and design reference for the development and application of CMUT technology.

Keywords

Acknowledgements

This work was supported by Applied Basic Research Program of Shanxi Province under Grant 201801D221179, and Doctoral Research Project of Taiyuan University of Science and Technology under Grant 20162036. National Natural Science Foundation of China under Grant 61127008, Industrial and Educational Cooperation and Collaborative Education Project of the Ministry of Education of China under Grant 201801121011.

Citation

Zhang, R., Zhao, L., Xie, D., Song, J., Zhang, W., Pan, L. and Zhang, Y. (2019), "Performance simulation and testing of capacitive micro-machined ultrasonic transducer", Sensor Review, Vol. 39 No. 4, pp. 554-566. https://doi.org/10.1108/SR-01-2019-0015

Publisher

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Emerald Publishing Limited

Copyright © 2019, Emerald Publishing Limited