TY  - JOUR
AB  - Purpose– This paper aims to provide a focused review on the geometrical designs for performance enhancement of piezoresistive microaccelerometers. Design/methodology/approach– By analyzing working principle and conventional geometries, the improved research proposals are sorted into three groups in terms of their anticipated objectives, including sensitivity, resonant frequency and cross-axis sensitivity. Accessible methods are outlined and their merits and demerits are described. Findings– Novel geometries obviously enhance the performance of accelerometers, and the efficacy can be further elevated by newer materials and fabrication processes. Research limitations/implications– This paper mainly focused on the improved geometrical designs for sensitivity, resonant frequency and cross-axis sensitivity. Other performance parameters or design schemes are not included in this paper. Originality/value– This paper generalizes the available geometries and methods for the enhancement of sensitivity, resonant frequency and cross-axis sensitivity in piezoresistive accelerometers design.
VL  - 35
IS  - 3
SN  - 0260-2288
DO  - 10.1108/SR-01-2015-0019
UR  - https://doi.org/10.1108/SR-01-2015-0019
AU  - Liu Yan
AU  - Wang Hai
AU  - Qin Hongbo
AU  - Xie Yongqiang
PY  - 2015
Y1  - 2015/01/01
TI  - Performance enhancement for piezoresistive microaccelerometer by geometrical design: a focused review
T2  - Sensor Review
PB  - Emerald Group Publishing Limited
SP  - 310
EP  - 318
Y2  - 2024/09/23
ER  -