This paper aims to provide a focused review on the geometrical designs for performance enhancement of piezoresistive microaccelerometers.
By analyzing working principle and conventional geometries, the improved research proposals are sorted into three groups in terms of their anticipated objectives, including sensitivity, resonant frequency and cross-axis sensitivity. Accessible methods are outlined and their merits and demerits are described.
Novel geometries obviously enhance the performance of accelerometers, and the efficacy can be further elevated by newer materials and fabrication processes.
This paper mainly focused on the improved geometrical designs for sensitivity, resonant frequency and cross-axis sensitivity. Other performance parameters or design schemes are not included in this paper.
This paper generalizes the available geometries and methods for the enhancement of sensitivity, resonant frequency and cross-axis sensitivity in piezoresistive accelerometers design.
This research is supported by the new teacher research support program in Xidian University and open foundation of State Key Laboratory for Mechanical Manufacturing Systems Engineering (Grant No. sklms2015011). The authors appreciate the help from Miss Yiyao Li in English improvement.
Liu, Y., Wang, H., Qin, H. and Xie, Y. (2015), "Performance enhancement for piezoresistive microaccelerometer by geometrical design: a focused review", Sensor Review, Vol. 35 No. 3, pp. 310-318. https://doi.org/10.1108/SR-01-2015-0019Download as .RIS
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