TY - JOUR AB - Purpose The purpose of this paper is to consider the changing of profile of heterostructure during growth with changing of temperature of substrate.Design/methodology/approach The authors introduced an analytical approach for the analysis of technological process.Findings The authors formulate the condition for minimization of changing of the profile.Originality/value The approach gives a possibility to analyze mass and heat transports in a heterostructure without cross-linking of solutions on interfaces between layers of the heterostructure with account nonlinearity of these transports and variation in time of their parameters. VL - 13 IS - 2 SN - 1573-6105 DO - 10.1108/MMMS-11-2016-0056 UR - https://doi.org/10.1108/MMMS-11-2016-0056 AU - Pankratov Evgeny L. AU - Bulaeva Elena Alexeevna PY - 2017 Y1 - 2017/01/01 TI - Influence of temperature of substrate during the growth of a heterostructure on properties of materials T2 - Multidiscipline Modeling in Materials and Structures PB - Emerald Publishing Limited SP - 326 EP - 330 Y2 - 2024/04/23 ER -