The purpose of this paper is to consider the changing of profile of heterostructure during growth with changing of temperature of substrate.
The authors introduced an analytical approach for the analysis of technological process.
The authors formulate the condition for minimization of changing of the profile.
The approach gives a possibility to analyze mass and heat transports in a heterostructure without cross-linking of solutions on interfaces between layers of the heterostructure with account nonlinearity of these transports and variation in time of their parameters.
This work is supported by the agreement of August 27, 2013 No. 02.В.49.21.0003 between The Ministry of Education and Science of the Russia and Lobachevsky State University of Nizhny Novgorod.
Pankratov, E.L. and Bulaeva, E.A. (2017), "Influence of temperature of substrate during the growth of a heterostructure on properties of materials", Multidiscipline Modeling in Materials and Structures, Vol. 13 No. 2, pp. 326-330. https://doi.org/10.1108/MMMS-11-2016-0056Download as .RIS
Emerald Publishing Limited
Copyright © 2017, Emerald Publishing Limited