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A novel approach for the fabrication of low-stress bimorph RF-MEMS switches

Hitesh Kumar Sharma (Materials Research Centre, Malaviya National Institute of Technology, Jaipur, India)
Shalu Rani (MEMS and Microsensors, Central Electronics Engineering Research Institute, Pilani, India)

Multidiscipline Modeling in Materials and Structures

ISSN: 1573-6105

Article publication date: 12 June 2017

Abstract

Purpose

The purpose of this paper is to design a low-cost stress bimorph RF-MEMS switch which is the desired transmission area application.

Design/methodology/approach

The bimorph structure of the low-temperature plasma-enhanced chemical vapor deposition (PECVD) of thermal oxide and gold are utilized to create the vibrating membrane. The effects of process conditions of low-temperature oxide deposited using the PECVD technique enable stress-free deposition of the key structural layer.

Findings

Scanning electron microscope images of the RF micro-switch confirms negligible stress in the released structure. The RF performances of this device exhibit isolation around 43 dB of up to 50 GHz in the OFF-state position and an insertion loss of less than 0.18 dB in the ON-state.

Originality/value

The finite element method results show good isolation of 43 dB and less insertion loss of 0.18 dB.

Keywords

Acknowledgements

Retraction Notice: The Publisher wishes to retract the article, “A novel approach for the fabrication of low stress bi-morph RF MEMS switch”, by Hitesh Kumar Sharma and Shalu Rani, in the journal Multidiscipline Modeling in Materials and Structures, Vol. 13 No. 1, 2017. It has come to the attention of the publisher that the article contains unattributed overlap with previously published articles, “Low loss STS based SPDT for X – Band applications”, by K. Maninder, A. Sharma, Dinesh Kumar, Surinder Singh and K. Rangra, DOI: 10.1016/j.proeng.2010.09.214 and “Design of Vertical Packaging Technology for RF MEMS Switch” by Deepak Bansal, Akshdeep Sharma, Maninder Kaur and K.J. Rangra, DOI: 10.1117/12.924260. Emerald aims to publish original content that adds to the body of knowledge and asks authors to warrant upon submission that their work meets our originality guidelines. This paper has been found to be in breach of this warranty and therefore the Emerald has made the decision to retract the paper. The author and journal sincerely apologise for this.

Citation

Sharma, H.K. and Rani, S. (2017), "A novel approach for the fabrication of low-stress bimorph RF-MEMS switches", Multidiscipline Modeling in Materials and Structures, Vol. 13 No. 1, pp. 116-121. https://doi.org/10.1108/MMMS-04-2016-0019

Publisher

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Emerald Publishing Limited

Copyright © 2017, Emerald Publishing Limited