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Spray-on glass solution for fabrication silicon solar cell emitter layer

Wojciech Filipowski (Faculty of Automatic Control, Electronics and Computer Science, Silesian University of Technology, Gliwice, Poland)
Edyta Wrobel (Institute of Electronics, Silesian University of Technology, Gliwice, Poland)
Kazimierz Drabczyk (Institute of Metallurgy and Materials Science, Polish Academy of Science, Krakow, Poland)
Krzysztof Waczynski (Institute of Electronics, Silesian University of Technology, Gliwice, Poland)
Grazyna Kulesza-Matlak (Institute of Metallurgy and Materials Science, Polish Academy of Science, Krakow, Poland)
Marek Lipinski (Institute of Metallurgy and Materials Science, Polish Academy of Science, Krakow, Poland)

Microelectronics International

ISSN: 1356-5362

Article publication date: 7 August 2017

Abstract

Purpose

The main aim of this study was a preparation development of dopant solution (DS) which can be deposited by a spray-on method and subsequently allows obtaining the n+ emitter layer with surface resistance in the range of 65-80 Ω−1. The intention of chosen spray-on method was to gain a cheaper way of dopant source deposition, compared to the commonly used methods, which is of particular importance for the new low-cost production processes.

Design/methodology/approach

This paper presents the sequence in producing a spray-on glass solution (DS) with very high concentration of phosphorus, which allows to perform diffusion doping at relatively low temperatures. DS contained deionized water, ethyl alcohol, tetraethoxysilane and othophosphoric acid.

Findings

The sequence in producing a DS was performed with respect to enabling the application to silicon wafers by spray-on method. Furthermore, the equations defined density and viscosity of DS in term of storage time were referred to determine the possibility of applying this solution by spray-on method. Besides, the dependence of the emitter surface resistance on the doping (diffusion) time was determined. Accordingly, optimal process conditions were specified.

Originality/value

The paper presents a new, so far unpublished composition of DS with very high concentration of phosphorus, which can be applied using a spray-on method. Moreover, original are also investigations respecting some properties of obtained DS relative to storage time.

Keywords

Acknowledgements

This work was partially supported by the Ministry of Science and Higher Education funding for statutory activities of researchers of Faculty of Automatic Control, Electronics and Computer Science and by the project “Isothermal and refrigeration photovoltaic car body”. The project is co-financed by The National Centre for Research and Development and The National Fund for Environmental Protection and Water Management, under the program GEKON (Generator of Ecological Concepts).

Citation

Filipowski, W., Wrobel, E., Drabczyk, K., Waczynski, K., Kulesza-Matlak, G. and Lipinski, M. (2017), "Spray-on glass solution for fabrication silicon solar cell emitter layer", Microelectronics International, Vol. 34 No. 3, pp. 149-153. https://doi.org/10.1108/MI-12-2016-0089

Publisher

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Emerald Publishing Limited

Copyright © 2017, Emerald Publishing Limited