Small ozone generator fabricated from low-temperature co-fired ceramics
Article publication date: 12 January 2021
Issue publication date: 3 March 2021
The purpose of this study is the design, fabrication and evaluation of a miniature ozone generator using the principle of electric discharge are presented.
The device was fabricated using a low-temperature co-fired ceramics (LTCC) technology, by which a multilayered ceramic structure with integrated electrodes, buried channels and cavities in micro and millimeter scales was realized.
The developed ozone generator with the dimensions of 63.6 × 41.8 × 1.3 mm produces approximately 1 vol. % of ozone in oxygen flow of 15 ml/min, at an applied voltage of 7 kV.
A miniature ozone generator, manufactured in LTCC technology, produces high amount of ozone and more than it is described in the available references or in datasheets of commercial devices of similar size.
The financial support of the Slovenian Research Agency through the research program P2-0105 and company KEKO Equipment is gratefully acknowledged.
The authors would like to acknowledge Mr Mitja Jerlah (CoE NAMASTE) for fabricating the ceramic structures and Branka Miklavčič (Faculty for Chemistry and Chemical Technology) for the technical support by evaluation of the ozone production in the micro-ozone generators.
Makarovič, K., Belavič, D., Malič, B., Benčan, A., Kovač, F. and Holc, J. (2021), "Small ozone generator fabricated from low-temperature co-fired ceramics", Microelectronics International, Vol. 38 No. 1, pp. 1-5. https://doi.org/10.1108/MI-07-2020-0043
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