To read the full version of this content please select one of the options below:

Hermetic capacitive pressure sensors for biomedical applications

Daniela Diaz-Alonso (LI-MEMS, National Institute for Astrophysics, Optics and Electronics, INAOE, Puebla, Mexico)
Mario Moreno-Moreno (LI-MEMS, National Institute for Astrophysics, Optics and Electronics, INAOE, Puebla, Mexico)
Carlos Zuñiga (LI-MEMS, National Institute for Astrophysics, Optics and Electronics, INAOE, Puebla, Mexico)
Joel Molina (LI-MEMS, National Institute for Astrophysics, Optics and Electronics, INAOE, Puebla, Mexico)
Wilfrido Calleja (LI-MEMS, National Institute for Astrophysics, Optics and Electronics, INAOE, Puebla, Mexico)
Juan Carlos Cisneros (Department of Mechatronics Engineering, UPAEP, Puebla, Mexico)
Luis Niño de Rivera (IPN-ESIME, National Polytechnic Institute of Mexico, Distrito Federal, Mexico)
Volodymir Ponomaryov (IPN-ESIME, National Polytechnic Institute of Mexico, Distrito Federal, Mexico)
Felix Gil (Hospital Luis Sanchez Bulnes, APEC, Distrito Federal, Mexico)
Angel Guillen (Department of Physics, CINVESTAV-IPN, Distrito Federal, Mexico)
Efrain Rubio (CUVyTT, BUAP, Puebla, Mexico)

Microelectronics International

ISSN: 1356-5362

Article publication date: 3 May 2016

Downloads
288

Abstract

Purpose

This paper aims to purpose the new design and fabrication scheme of Touch Mode Capacitive Pressure Sensor (TMCPS), which can be used in a wireless integrated resistor, inductor and capacitor circuit for monitoring pressure in biomedical applications.

Design/methodology/approach

This study focuses on the design, simulation and fabrication of dynamic capacitors, based on surface micromachining using polysilicon or aluminum films as the top electrode, both structural materials are capped with a 1.5 μm-thick polyimide film.

Findings

The design of microstructures using a composite model fits perfectly the preset mechanical behavior. After the full fabrication, the dynamic capacitors show complete mechanical flexibility and stability.

Originality/value

The novelty of the method presented in this study includes two important aspects: first, the capacitors are designed as a planar cavity within a rigid frame, where two walls contain channels which allow for the etching of the sacrificial material. Second, the electromechanical structures are designed using a composite model that includes a polyimide film capping for a precise pressure sensing, which also protects the internal cavity and, at the same time, provides full biocompatibility.

Keywords

Acknowledgements

Authors acknowledge the support from Manuel Escobar and the technicians of the LI-MEMS and Microelectronics Laboratory at INAOE, and also to CONACyT-Mexico, for the scholarship number 224192.

Citation

Diaz-Alonso, D., Moreno-Moreno, M., Zuñiga, C., Molina, J., Calleja, W., Carlos Cisneros, J., de Rivera, L.N., Ponomaryov, V., Gil, F., Guillen, A. and Rubio, E. (2016), "Hermetic capacitive pressure sensors for biomedical applications", Microelectronics International, Vol. 33 No. 2, pp. 79-86. https://doi.org/10.1108/MI-05-2015-0046

Publisher

:

Emerald Group Publishing Limited

Copyright © 2016, Emerald Group Publishing Limited