TY - JOUR AB - Purpose The purpose of this paper is to investigate the nanoscale electric performance of NiO thin films in grain boundary and grain face.Design/methodology/approach PeakForce tunnel atomic force is applied to visualize the nanoscale current imaging of the NiO thin film on fluorine tin oxide substrate.Findings The results show that the grain boundary has a significant impact on the nanoscale current of the NiO film. The electronic conductivity and in grain boundary is higher than that of the NiO film in grain face. The width of the conductive zone in the NiO film over grain boundaries is ∼ 60 nm. The tunnel current between the tip and the NiO film is consistent with the Fowler–Nordheim tunnel model.Originality/value The higher tunnel current in grain boundary is probably attributed to the enhanced energy band bending and adhesion force. VL - 36 IS - 4 SN - 1356-5362 DO - 10.1108/MI-02-2019-0008 UR - https://doi.org/10.1108/MI-02-2019-0008 AU - Zhang Yidong PY - 2019 Y1 - 2019/01/01 TI - Observation of the enhanced tunnel current of NiO thin films in grain boundary by peakforce TUNA T2 - Microelectronics International PB - Emerald Publishing Limited SP - 160 EP - 164 Y2 - 2024/09/19 ER -