The purpose of this paper is to design and develop 14-degree of freedom (DOF) robotic micromanipulator with which LIGA devices and axle hole part can be both manipulated and assembled.
The in-house robotic microassembly system is composed of a 6-DOF large motion serial robot with microgrippers, a hexapod six-DOF precision alignment worktable and a vision system whose optical axis of the microscope is parallel with the horizontal plane. A prism with special coating is fixed in front of the objective lens, thus, two-part figures can be acquired simultaneously by the microscope with 1.67 to 9.26 micron optical resolution. The relative discrepancy between the two parts can be calculated from image plane coordinate instead of calculating the space transformation matrix. A modified microgripper was designed to clamp meso-scale parts and its effectiveness was confirmed experimentally. Through the use of the other vision system, the insert action can be successfully manipulated. A laser ranger finder was integrated in this micro-assembly system to measure the assembly result.
A new 14-DOF robotic micromanipulator, including eight axes automatically and six axes manually, has been developed for the assembly of LIGA meso-scale flat parts and axle hole parts. The microassembly system with coaxial alignment function (MSCA) system is able to concurrently manipulate all eight axes automatically and six axes manually.
The robotic microassembly is applied in the assembly of meso-scale parts. The new capabilities of the MSCA will allow for the assembly of microsystems more efficiently and more precisely.
This work was financially supported by the National Natural Science Foundation of China (51127004) and (51105036). Any opinions, findings and conclusions or recommendations expressed in this material are those of the authors and do not necessarily reflect the views of the National Science Foundation.
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