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Design and vibration analysis of a self-adaptive piston in a novel nanoimprint system

Chaoran Liu (Physical Engineering College, Zhengzhou University, Zhengzhou, China)
Yufeng Su (Zhengzhou University, Zhengzhou, China)
Jinzhao Yue (Zhengzhou University, Zhengzhou, China)
Junjie Wang (Zhengzhou University, Zhengzhou, China)
Weiwei Xia (Zhengzhou University, Zhengzhou, China)
Dongxue Li (Zhengzhou University, Zhengzhou, China)
Wen Wang (Zhengzhou University, Zhengzhou, China)
Pan Wang (Zhengzhou University, Zhengzhou, China)
Zhiyong Duan (Zhengzhou University, Zhengzhou, China)

Industrial Lubrication and Tribology

ISSN: 0036-8792

Article publication date: 10 July 2017




A self-adaptive piston is designed for the compressional gas cushion press nanoimprint lithography system. It avoids the lube pollution and high wear of traditional piston.


The self-adaptive piston device consists of symmetrical piston bodies, piston rings and other parts. The two piston bodies are linked by a ball-screw. The locking nut adjusts the distance between two piston bodies to avoid the piston rings from being stuck. The piston rings are placed between two piston bodies.


The simulation results based on COMSOL indicate that cylinder vibration caused by self-adaptive piston is 15.9 times smaller than the one caused by a traditional piston.


The self-adaptive piston is superior to the traditional piston in decreasing cylinder vibration.



This work was financially supported by the National Natural Science Foundation of China [Grant No. 51175479] and the Education Department of Henan Province, China. [Grant Nos. 13A460725, 2013GGJS-001].


Liu, C., Su, Y., Yue, J., Wang, J., Xia, W., Li, D., Wang, W., Wang, P. and Duan, Z. (2017), "Design and vibration analysis of a self-adaptive piston in a novel nanoimprint system", Industrial Lubrication and Tribology, Vol. 69 No. 4, pp. 591-597.



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