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Synthesis, structural and nanomechanical properties of cobalt based thin films

Elias P. Koumoulos (School of Chemical Engineering, National Technical University of Athens, Athens, Greece.)
Vasiliki P. Tsikourkitoudi (School of Chemical Engineering, National Technical University of Athens, Athens, Greece.)
Ioannis A. Kartsonakis (School of Chemical Engineering, National Technical University of Athens, Athens, Greece.)
Vassileios E. Markakis (School of Chemical Engineering, National Technical University of Athens, Athens, Greece.)
Nikolaos Papadopoulos (School of Mining Engineering and Metallurgy, National Technical University of Athens, Athens, Greece.)
Evangelos Hristoforou (School of Mining Engineering and Metallurgy, National Technical University of Athens, Athens, Greece.)
Costas A. Charitidis (School of Chemical Engineering, National Technical University of Athens, Athens, Greece.)

International Journal of Structural Integrity

ISSN: 1757-9864

Article publication date: 13 April 2015

185

Abstract

Purpose

The purpose of this paper is to produce cobalt (Co)-based thin films by metalorganic chemical vapor deposition (CVD) technique and then to evaluate structural and mechanical integrity.

Design/methodology/approach

Co-based thin films were produced by metalorganic CVD technique. Boronizing, carburization and nitridation of the produced Co thin films were accomplished through a post-treatment stage of thermal diffusion into as-deposited Co thin films, in order to produce cobalt boride (Co2B), cobalt carbide and cobalt nitride thin films in the surface layer of Co. The surface topography and the crystal structure of the produced thin films were evaluated through scanning electron microscopy and X-ray diffraction, respectively. The mechanical integrity of the produced thin films was evaluated through nanoindentation technique.

Findings

The obtained results indicate that Co2B thin film exhibits the highest nanomechanical properties (i.e. H and E), while Co thin film has enhanced plasticity. The cobalt oxide thin film exhibits higher resistance to wear in comparison to the cobalt thin film, a fact that is confirmed by the nanoscratch analysis showing lower coefficient of friction for the oxide.

Originality/value

This work is original.

Keywords

Acknowledgements

The authors wish to acknowledge NTUA funded project for basic research PEVE-NTUA-2010/65187900 and Alexandros S. Onassis Public Benefit Foundation for the support of this work. The authors are indebted to Professor P. Patsalas for his support and contribution in XRD analysis.

Citation

Koumoulos, E.P., Tsikourkitoudi, V.P., Kartsonakis, I.A., Markakis, V.E., Papadopoulos, N., Hristoforou, E. and Charitidis, C.A. (2015), "Synthesis, structural and nanomechanical properties of cobalt based thin films", International Journal of Structural Integrity, Vol. 6 No. 2, pp. 225-242. https://doi.org/10.1108/IJSI-10-2013-0031

Publisher

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Emerald Group Publishing Limited

Copyright © 2015, Emerald Group Publishing Limited

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