Synthesis, structural and nanomechanical properties of cobalt based thin films
International Journal of Structural Integrity
ISSN: 1757-9864
Article publication date: 13 April 2015
Abstract
Purpose
The purpose of this paper is to produce cobalt (Co)-based thin films by metalorganic chemical vapor deposition (CVD) technique and then to evaluate structural and mechanical integrity.
Design/methodology/approach
Co-based thin films were produced by metalorganic CVD technique. Boronizing, carburization and nitridation of the produced Co thin films were accomplished through a post-treatment stage of thermal diffusion into as-deposited Co thin films, in order to produce cobalt boride (Co2B), cobalt carbide and cobalt nitride thin films in the surface layer of Co. The surface topography and the crystal structure of the produced thin films were evaluated through scanning electron microscopy and X-ray diffraction, respectively. The mechanical integrity of the produced thin films was evaluated through nanoindentation technique.
Findings
The obtained results indicate that Co2B thin film exhibits the highest nanomechanical properties (i.e. H and E), while Co thin film has enhanced plasticity. The cobalt oxide thin film exhibits higher resistance to wear in comparison to the cobalt thin film, a fact that is confirmed by the nanoscratch analysis showing lower coefficient of friction for the oxide.
Originality/value
This work is original.
Keywords
Acknowledgements
The authors wish to acknowledge NTUA funded project for basic research PEVE-NTUA-2010/65187900 and Alexandros S. Onassis Public Benefit Foundation for the support of this work. The authors are indebted to Professor P. Patsalas for his support and contribution in XRD analysis.
Citation
Koumoulos, E.P., Tsikourkitoudi, V.P., Kartsonakis, I.A., Markakis, V.E., Papadopoulos, N., Hristoforou, E. and Charitidis, C.A. (2015), "Synthesis, structural and nanomechanical properties of cobalt based thin films", International Journal of Structural Integrity, Vol. 6 No. 2, pp. 225-242. https://doi.org/10.1108/IJSI-10-2013-0031
Publisher
:Emerald Group Publishing Limited
Copyright © 2015, Emerald Group Publishing Limited