Micropositioning device for automatic alignment of substrates for industrial‐scale thin films deposition

Abstract

A spatial micropositioning device for the alignment of substrates employed in thin films synthesis by the so‐called combustion flame technique, utilized for producing thin diamond films, was designed and built. A combination of mechanical, electronic and optical components allowed, with high accuracy, the alignment of the substrate during the film deposition process. The system always kept the substrate surface perpendicular to the oxy‐acetylene flame produced by the torch, in such a way that each deposited film consists of a circular disk, approximately 4mm in diameter and 20μm thick, over the region of the substrate that intersects the inner acetylene‐rich flame. The films obtained under these conditions showed low nitrogen content, as confirmed by the Fourier‐transform infrared spectrum (FTIR), which is also presented. Accordingly, the present work represents the first step towards a complete automation of the combustion diamond deposition technique, aiming to design an operating industrial‐level technology.

Citation

Castañeda, A., Apátiga, L.M., Velázquez, R. and Castaño, V.M. (2001), "Micropositioning device for automatic alignment of substrates for industrial‐scale thin films deposition", Assembly Automation, Vol. 21 No. 4, pp. 336-341. https://doi.org/10.1108/EUM0000000006015