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Ring gyroscope sensitive element based on nanoporous alumina

Gennady Gorokh (Department of Micro- and Nanoelectronics, Belarusian State University of Informatics and Radioelectronics, Minsk, Belarus)
Yauhen Belahurau (Department of Micro- and Nanotechnics, Belarusian National Technical University, Minsk, Belarus)
Anna Zakhlebayeva (Department of Micro- and Nanoelectronics, Belarusian State University of Informatics and Radioelectronics, Minsk, Belarus)
Igor Taratyn (Department of Micromechanics, Minsk Research Institute of Radiomaterials, Minsk, Belarus)
Viatcheslav Khatko (Department of Micro- and Nanotechnics, Belarusian National Technical University, Minsk, Belarus)

Aircraft Engineering and Aerospace Technology

ISSN: 0002-2667

Article publication date: 2 January 2018

112

Abstract

Purpose

This paper aims to present new technological approaches of manufacturing of micromechanical gyroscope ring-sensitive element based on the nanoporous anodic alumina instead of traditional silicon technology. Simulation and the operation analyses of such elements have been performed.

Design/methodology/approach

The design of gyroscope represents a sensitive element on a glass substrate; in the center of a ring, there is a permanent magnet in a steel box. The sensitive element is made of profiled nanoporous anodic alumina consisting of an octagonal frame which is connected to a ring in the center with eight N-shaped spokes. The technology of the sensitive element fabrication involves the electrochemical formation of nanoporous anodic alumina substrate given the thickness and porosity and its chemical etching on the element topology. The basic parameters and the operation principle of the nanoporous alumina-sensitive element have been defined by finite element simulation.

Findings

It is shown that the resonance frequencies of the sensitive element change as functions of the alumina porosity. The main parameters of the nanoporous alumina-sensitive element have been compared with parameters of a silicon-sensitive element. Calculations have shown that the mechanical deformations of the von Mises are approximately lower by two times in the nanoporous alumina-sensitive element.

Practical implications

High-precision angular rate measurement will be achieved by reducing mechanical and electrical noises practically to zero through careful designing of a ring magnetoelectric gyroscope

Originality/value

The ring resonator made of nanoporous anodic alumina will allow to increase the threshold of sensitivity and stability of micromechanical gyroscope characteristics owing to the high precision of geometric dimensions, the stability of the elastic properties and the quality factor.

Keywords

Citation

Gorokh, G., Belahurau, Y., Zakhlebayeva, A., Taratyn, I. and Khatko, V. (2018), "Ring gyroscope sensitive element based on nanoporous alumina", Aircraft Engineering and Aerospace Technology, Vol. 90 No. 1, pp. 43-50. https://doi.org/10.1108/AEAT-01-2015-0026

Publisher

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Emerald Publishing Limited

Copyright © 2018, Emerald Publishing Limited

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