Micro-assembly precise coaxial alignment methodology based on surface roughness and reflectiveness matching
Abstract
Purpose
The purpose of this paper is to propose a novel method of coaxial optical precision alignment based on surface roughness and reflectiveness matching.
Design/methodology/approach
The micro-assembly experiment system set-up was constructed according to the principle of the coaxial optical alignment. The coaxial optical alignment error is theoretically analyzed and calculated. When the prism orthogonal alignment mechanism produces the error of 0.001°, the theoretical deviation was less than 0.87 μm and the actual experimental micro-assembly platform assembly accuracy exceeded 3 μm. A peg-in-hole precise assembly of punching pin micro-assembly experiment was done in order to validate feasibility of this method.
Findings
The results indicate that coaxial optical precision alignment could be used for the assembly of complex micro-heterogeneous system which is integrated by similar devices, such as 3D complex micro-structures, silicon micro-electro-mechanical system (MEMS) devices and non-silicon MEMS devices with flat structure.
Originality/value
The paper provides certain methodological guidelines for MEMS for high precision automatic assembly of complex 3D micro-structures.
Keywords
Acknowledgements
This work was financially supported by the National Natural Science Foundation of China (51127004) and (51105036), Ministries Fund of China (0920110013). Any opinions, findings, and conclusions or recommendations expressed in this material are those of the authors and do not necessarily reflect the views of the National Science Foundation.
Citation
Tang, Y.-l., Zhang, Z.-j., Ye, X. and Zhang, X.-f. (2014), "Micro-assembly precise coaxial alignment methodology based on surface roughness and reflectiveness matching", Assembly Automation, Vol. 34 No. 2, pp. 141-150. https://doi.org/10.1108/AA-03-2013-029
Publisher
:Emerald Group Publishing Limited
Copyright © 2014, Emerald Group Publishing Limited