Positioning accuracy characterization of assembled microscale components for micro-optical benches
Abstract
Purpose
This paper aims to deal with the measurement of positioning accuracies of microscale components assembled to fabricate micro-optical benches (MOB).
Design/methodology/approach
The concept of MOB is presented to explain how to fabricate optical MEMS based on out-of-plane micro-assembly of microcomponents. This micro-assembly platform includes a laser sensor that enables to measure the position of the microcomponent after its assembly. The measurement set-up and procedure is displayed and applied on several micro-assembly sets.
Findings
The measurement system provides results with maximum deviation smaller than ±0.005°. Based on this measurement system and micro-assembly procedure displayed in the article, it is shown that it is possible to obtain a positioning accuracy up to 0.009°.
Originality/value
These results clearly show that micro-assembly is a possible way to fabricate complex, heterogeneous and 3D optical MEMS with very good optical performances.
Keywords
Acknowledgements
These works have been funded by the Franche-Comte region, partially supported by the Labex ACTION project (contract “ANR-11-LABX-01-01”) and by the French RENATECH network through its FEMTO-ST technological facility. The authors would like to acknowledge Sylwester Bargiel, Christophe Gorecki for their contribution about micro-optical bench design and fabrication but also Jean-Philippe Mascaro and David Guibert for technical support.
Citation
Clévy, C., Lungu, I., Rabenorosoa, K. and Lutz, P. (2014), "Positioning accuracy characterization of assembled microscale components for micro-optical benches", Assembly Automation, Vol. 34 No. 1, pp. 69-77. https://doi.org/10.1108/AA-02-2013-011
Publisher
:Emerald Group Publishing Limited
Copyright © 2014, Emerald Group Publishing Limited