This paper aims to deal with the measurement of positioning accuracies of microscale components assembled to fabricate micro-optical benches (MOB).
The concept of MOB is presented to explain how to fabricate optical MEMS based on out-of-plane micro-assembly of microcomponents. This micro-assembly platform includes a laser sensor that enables to measure the position of the microcomponent after its assembly. The measurement set-up and procedure is displayed and applied on several micro-assembly sets.
The measurement system provides results with maximum deviation smaller than ±0.005°. Based on this measurement system and micro-assembly procedure displayed in the article, it is shown that it is possible to obtain a positioning accuracy up to 0.009°.
These results clearly show that micro-assembly is a possible way to fabricate complex, heterogeneous and 3D optical MEMS with very good optical performances.
Clévy, C., Lungu, I., Rabenorosoa, K. and Lutz, P. (2014), "Positioning accuracy characterization of assembled microscale components for micro-optical benches", Assembly Automation, Vol. 34 No. 1, pp. 69-77. https://doi.org/10.1108/AA-02-2013-011Download as .RIS
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