Positioning accuracy characterization of assembled microscale components for micro-optical benches

Cédric Clévy (AS2M Department, FEMTO-ST Institute, Université de Franche-Comté/CNRS/ENSMM/UTBM, Besancon, France)
Ion Lungu (AS2M Department, FEMTO-ST Institute, Université de Franche-Comté/CNRS/ENSMM/UTBM, Besancon, France)
Kanty Rabenorosoa (AS2M Department, FEMTO-ST Institute, Université de Franche-Comté/CNRS/ENSMM/UTBM, Besancon, France)
Philippe Lutz (AS2M Department, FEMTO-ST Institute, Université de Franche-Comté/CNRS/ENSMM/UTBM, Besancon, France)

Assembly Automation

ISSN: 0144-5154

Publication date: 28 January 2014

Abstract

Purpose

This paper aims to deal with the measurement of positioning accuracies of microscale components assembled to fabricate micro-optical benches (MOB).

Design/methodology/approach

The concept of MOB is presented to explain how to fabricate optical MEMS based on out-of-plane micro-assembly of microcomponents. This micro-assembly platform includes a laser sensor that enables to measure the position of the microcomponent after its assembly. The measurement set-up and procedure is displayed and applied on several micro-assembly sets.

Findings

The measurement system provides results with maximum deviation smaller than ±0.005°. Based on this measurement system and micro-assembly procedure displayed in the article, it is shown that it is possible to obtain a positioning accuracy up to 0.009°.

Originality/value

These results clearly show that micro-assembly is a possible way to fabricate complex, heterogeneous and 3D optical MEMS with very good optical performances.

Keywords

Citation

Clévy, C., Lungu, I., Rabenorosoa, K. and Lutz, P. (2014), "Positioning accuracy characterization of assembled microscale components for micro-optical benches", Assembly Automation, Vol. 34 No. 1, pp. 69-77. https://doi.org/10.1108/AA-02-2013-011

Download as .RIS

Publisher

:

Emerald Group Publishing Limited

Copyright © 2014, Emerald Group Publishing Limited

Please note you might not have access to this content

You may be able to access this content by login via Shibboleth, Open Athens or with your Emerald account.
If you would like to contact us about accessing this content, click the button and fill out the form.
To rent this content from Deepdyve, please click the button.