Thick Film Microchannels: Design and Fabrication
Abstract
The study of relevant geometrical parameters for the design and fabrication of thick film microchannels has been considered in this work. An analysis of geometrical behaviour was performed applying linear regression techniques. This procedure allows the design of structural elements (lateral walls) necessary for channels, predicting the final dimensions for original screen pattern design. A 100 μm wide and 15 μm high microchannel was constructed on the basis of the characteristics defined in the study.
Keywords
Citation
Filippini, D., Fraigi, L. and Gwirc, S. (1996), "Thick Film Microchannels: Design and Fabrication", Microelectronics International, Vol. 13 No. 2, pp. 9-12. https://doi.org/10.1108/13565369610800232
Publisher
:MCB UP Ltd
Copyright © 1996, MCB UP Limited