To read this content please select one of the options below:

Thick Film Microchannels: Design and Fabrication

D. Filippini (Research Center for Electronics and Informatics Technology, National Institute of Industrial Technology, Buenos Aires, Argentina)
L. Fraigi (Research Center for Electronics and Informatics Technology, National Institute of Industrial Technology, Buenos Aires, Argentina)
S. Gwirc (Research Center for Electronics and Informatics Technology, National Institute of Industrial Technology, Buenos Aires, Argentina)

Microelectronics International

ISSN: 1356-5362

Article publication date: 1 August 1996

122

Abstract

The study of relevant geometrical parameters for the design and fabrication of thick film microchannels has been considered in this work. An analysis of geometrical behaviour was performed applying linear regression techniques. This procedure allows the design of structural elements (lateral walls) necessary for channels, predicting the final dimensions for original screen pattern design. A 100 μm wide and 15 μm high microchannel was constructed on the basis of the characteristics defined in the study.

Keywords

Citation

Filippini, D., Fraigi, L. and Gwirc, S. (1996), "Thick Film Microchannels: Design and Fabrication", Microelectronics International, Vol. 13 No. 2, pp. 9-12. https://doi.org/10.1108/13565369610800232

Publisher

:

MCB UP Ltd

Copyright © 1996, MCB UP Limited

Related articles