The purpose of this paper is to synthesize Si (porous silicon (PS)) by laser‐induced etching (LIE) technique. The LIE process has the added advantage of a controlling size and optical properties without using of electrodes. The LIE process is a promising technique for fabricating many optoelectronic devices including: light‐emitting devices, detectors, sensors and large‐scale integrated circuits.
PS has been fabricated by LIE technique. Surface morphology and structural properties of nanostructures are characterized by using scanning electron microscopy and X‐ray diffraction (XRD). Photoluminescence (PL) measurement is also performed at room temperature by using He‐Cd laser (λ=325 nm) and Raman scattering has been investigated using Ar+ laser (λ=514 nm).
Surface morphology indicated that chemical reaction has been initiated with laser power density of 12 W/cm2, resulting in irregular structure. Micro‐columns are structured on surface with laser power density of 25 W/cm2. The pores structures are confined to smaller size, and the walls between the pore become extremely thin and shorter at 64 W/cm2 power density and 120 min irradiation time. PL spectra at room temperature for PS prepared at power density of 64 W/cm2 and irradiation time of 120 min shows the blue shift of PL at 400 nm and the full‐width and half maximum is about 60 nm. The broadening of the band gap energy occurs with a decrease of the crystallite size. The average diameter of nanosize Si crystallites is about 6‐10 nm. XRD indicated that the broadening in spectrum is due to the small size crystallites.
LIE processes have been used to produce high‐luminescent nanocrystallites with small size and size distribution, which is due to the quantum confinement effect.
Ramizy, A., Omar, K. and Hassan, Z. (2010), "High photoluminescence of silicon nanostructures synthesized by laser‐induced etching", Microelectronics International, Vol. 27 No. 1, pp. 45-48. https://doi.org/10.1108/13565361011009522Download as .RIS
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