Identification of an equivalent model for the permanent magnets of a magnetron sputtering device

Abstract

Purpose

The aim of the work was to obtain an auxiliary instrument able to give the magnetic configuration of a magnetron sputtering device for operation with targets, magnetic and non magnetic, with different heights, starting from a device with no detailed information of the source.

Design/methodology/approach

An inverse problem has been dealt with. A 2D numerical analysis has been performed, which utilizes as a starting point a model identified with a simple analytical procedure based on measurements.

Findings

A satisfactory equivalent model has been identified, and validated in several different conditions.

Originality/value

The proposed approach can be applied when no detailed information of the source is available, in the case of a cathode without a ferromagnetic yoke.

Citation

Desideri, D., Maschio, A., Doru Micu, D. and Ramona Miron, O. (2012), "Identification of an equivalent model for the permanent magnets of a magnetron sputtering device", COMPEL - The international journal for computation and mathematics in electrical and electronic engineering, Vol. 31 No. 2, pp. 514-527. https://doi.org/10.1108/03321641211200563